Research on novel thin-film semiconductor processing techniques such as crystalline growth, low-temperature deposition of insulator films, and junction formation and their application to large-area electronics (solar cells, flat panel displays, etc) and ULSI devices.

email: sehiga@  

Development of new thin-film structure formation technology and research of its application to quantum-effect devices.

email: hanafus@  

Research on developing the novel technique for crystal thin film formation applying the physical external force and the semiconductor device application using its technique.

email: y-mizukawa@